CVD-SiC Coated Boat

The silicon carbide boat is the core supporting component in the wafer oxidation and diffusion process, primarily used to hold silicon wafers. It demands extremely high purity—exceeding 99.999%—and the content of metallic particles must be strictly controlled.

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CVD-SiC Coating

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CVD-SiC Coated Boat (Silicon carbide boats are the core support components in the wafer oxidation and diffusion process, primarily used to hold silicon wafers. They demand extremely high purity—exceeding 99.999%—and require strict control over metal particle content. Leveraging its core advantages of wear resistance, corrosion resistance, high‑temperature shock resistance, and plasma erosion resistance, coupled with strong high‑temperature load-bearing capacity, high thermal conductivity, and excellent heat dissipation, CVD‑SiC coated boats are well suited to the demanding operating conditions of semiconductor diffusion processes.)

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