Epitaxial Graphite Substrates for the LED Industry

The CVD-SiC coating deposited on the graphite substrate exhibits a high thermal expansion coefficient match with the graphite base material, boasts excellent resistance to acid and alkali corrosion, effectively prevents graphite powdering and corrosive damage, and extends the service life of the substrate.

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CVD-SiC Coating

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The extended graphite carrier plate is compatible with CVD equipment used in the LED industry and is primarily employed for substrate support during wafer deposition. The deposition process is constrained by multiple factors, including gas flow direction (horizontal/vertical), temperature, pressure, substrate fixation accuracy, and the potential for contaminant detachment. To ensure process stability, it is essential to use dedicated graphite substrates. The CVD-SiC coating applied to the surface of the graphite substrate exhibits a high degree of thermal expansion coefficient matching with the graphite base material and boasts excellent resistance to acid and alkali corrosion. This effectively prevents graphite powder shedding and corrosive damage, thereby extending the service life of the substrate.

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CVD-SiC Coated Boat

Silicon Carbide Coated Graphite Components for SiC Epitaxy

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