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Si epitaxial graphite carrier tray
Si epitaxial graphite substrates exhibit excellent thermal stability, chemical inertness, and cleanliness, ensuring uniform growth of the epitaxial layer and high wafer yield.
The silicon carbide boat is the core supporting component in the wafer oxidation and diffusion process, primarily used to hold silicon wafers. It demands extremely high purity—exceeding 99.999%—and the content of metallic particles must be strictly controlled.
Epitaxial Graphite Substrates for the LED Industry
The CVD-SiC coating deposited on the graphite substrate exhibits a high thermal expansion coefficient match with the graphite base material, boasts excellent resistance to acid and alkali corrosion, effectively prevents graphite powdering and corrosive damage, and extends the service life of the substrate.
Silicon Carbide Coated Graphite Components for SiC Epitaxy
It primarily addresses high‑temperature corrosion and contamination—such as the tendency of conventional graphite to oxidize and pulverize in oxygen‑containing environments. In etching processes, SiC coatings resist corrosive gases like Cl₂ and CF₄, protecting the chamber structure. This reduces the risk of particle shedding, extends component lifetimes by 3–5 times, and lowers equipment maintenance costs.
Silicon carbide–coated heating wires are indispensable components in single‑crystal silicon pulling furnaces, polycrystalline silicon ingot casting furnaces, high‑temperature industrial furnaces, and laboratory equipment.
Silicon carbide–coated heating wires are indispensable components in single‑crystal silicon pulling furnaces, polycrystalline silicon ingot casting furnaces, high‑temperature industrial furnaces, and laboratory equipment.
Pyrolytic carbon coatings are key surface modification materials in the fields of high‑end equipment and medical implants.
Pyrolytic carbon coatings are key surface modification materials in the fields of high‑end equipment and medical implants.
Pyrolytic carbon coatings are key surface modification materials in the fields of high‑end equipment and medical implants.
Particularly suitable for applications in semiconductors, high‑temperature furnaces, metal forming, and electronic insulation—scenarios that place stringent demands on cleanliness, insulation, anti‑adhesion, and high‑temperature resistance.
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Henan RuiCi Technology Co., Ltd.
Sales Hotline：+8619138184728
Technical Hotline：+8619303977251
Address： Panrui New Materials Industrial Park, Zhanjie Town, Gongyi City, Henan Province
WhatsApp：8619138184728
Technical Hotline：+86-19303977251
Sales Hotline：+86-19138184728
Email：zhaihaifeng@van-research.cn